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Maroc Maroc - TECHXPLORE.COM - Electronics & Semiconductors - 14/Feb 19:34

Novel transparent ceramics extend life of semiconductor etching equipment

A research team has successfully developed a new composition and processing technology for transparent plasma-resistant high-entropy ceramics. This innovation is the first of its kind in the world and is designed to extend the lifespan of internal components in semiconductor etching equipment while reducing contamination particles during the semiconductor manufacturing process. The study is published in the Journal of Advanced Ceramics.

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