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Maroc Maroc - TECHXPLORE.COM - RSS news feed - 06/Jan 21:11

New semiconductor etching process achieves five-fold speed improvement

After more than a decade of research and development, Tokyo Electron Miyagi Ltd. has introduced an innovative semiconductor etching method that achieves etch rates up to five times faster than conventional processes. Now, a collaborative research team from Nagoya University and the company has examined the underlying etching mechanisms responsible for this enhanced performance.

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